Boundary acoustic wave device

ABSTRACT

Regarding a boundary acoustic wave device in which at least a part of an IDT electrode is embedded in a groove disposed in a piezoelectric substrate, the acoustic velocity is increased. A boundary acoustic wave device is provided with a piezoelectric substrate, a first dielectric layer, and an IDT electrode. The surface of the piezoelectric substrate is provided with a groove. The IDT electrode is disposed at the boundary between the piezoelectric substrate and the first dielectric layer in such a way that at least a part thereof is located in the groove. In the inside of the groove, the groove angle γ, which is the size of an angle formed by an upper end portion of the inside surface of the groove with the surface of the piezoelectric substrate, is less than 90 degrees.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a boundary acoustic wave device for useas a resonator and a filter device, for example. In particular, thepresent invention relates to a boundary acoustic wave device in which atleast a portion of an IDT electrode is embedded in a groove disposed ina piezoelectric substrate.

2. Description of the Related Art

The boundary acoustic wave device is an elastic wave device which doesnot require a package having a cavity and which can be miniaturized ascompared with a surface acoustic wave device. Therefore, the boundaryacoustic wave device has attracted rising attention in recent years.

For example, WO 2008/044411 A1 described below discloses a boundaryacoustic wave device in which at least a portion of an IDT electrode isembedded in a groove disposed in a piezoelectric substrate. FIG. 78 is amagnified schematic cross-sectional view showing a portion of an IDTelectrode of this boundary acoustic wave device. As shown in FIG. 78, aboundary acoustic wave device 101 is provided with a LiNbO₃ substrate102. A silicon oxide film 103 is disposed on the LiNbO₃ substrate 102.An IDT electrode 104 is disposed at the boundary between the LiNbO₃substrate 102 and the silicon oxide film 103. The IDT electrode 104 isembedded in a groove 102 a disposed in the LiNbO₃ substrate 102. Theupper surface of the IDT electrode 104 must be flush with the surface ofthe LiNbO₃ substrate 102.

WO 2008/044411 A1 discloses that the upper surface of the IDT electrode104 must be flush with the surface of the LiNbO₃ substrate 102, theupper surface of the silicon oxide film 103 is flat and, thereby, a lowinsertion loss can be realized.

However, regarding the boundary acoustic wave device 101 in which theIDT electrode 104 is embedded in the groove 102 a of the LiNbO₃substrate 102, there is a problem in that the acoustic velocity ofpropagating boundary acoustic wave cannot be increased sufficiently.

SUMMARY OF THE INVENTION

In consideration of such circumstances, preferred embodiments of thepresent invention increase an acoustic velocity of a boundary acousticwave device in which at least a portion of an IDT electrode is embeddedin a groove disposed in a piezoelectric substrate.

A boundary acoustic wave device according to a preferred embodiment ofthe present invention includes a piezoelectric substrate, a firstdielectric layer, and an IDT electrode. A surface of the piezoelectricsubstrate is provided with a groove. The first dielectric layer isdisposed on the surface of the piezoelectric substrate. The IDTelectrode is disposed at a boundary between the piezoelectric substrateand the first dielectric layer in such a way that at least a portionthereof is located in the groove. Inside of the groove, a groove angle,which is the size of an angle defined by an upper end portion of aninside surface of the groove with the surface of the piezoelectricsubstrate, is less than about 90 degrees, for example.

In the present specification, it is defined that the surface of thepiezoelectric substrate does not include the bottom surface and the sidesurface of the groove.

In a preferred embodiment of the present invention, a portion of the IDTelectrode is located outside the groove, and the portion of the IDTelectrode located outside the groove is tapered so as to decrease insize moving away from the piezoelectric substrate. Regarding thisconfiguration, it becomes difficult to form a gap between the firstdielectric layer and the IDT electrode and, therefore, degradation infilter characteristic and resonant characteristic can be prevented.

In another preferred embodiment of the present invention, the boundaryacoustic wave device is further provided with a second dielectric layerwhich is disposed on the first dielectric layer and which has anacoustic velocity larger than that of the first dielectric layer. Aboundary acoustic wave is confined in the first dielectric layereffectively by disposing the second dielectric layer. Therefore, theinsertion loss can be reduced because of a waveguide effect.

In another preferred embodiment of the present invention, each of thefirst and the second dielectric layers is preferably made of siliconoxide, silicon nitride, or aluminum nitride, for example.

In another preferred embodiment of the present invention, the averagedensity of the portion of the IDT electrode located in the groove ishigher than the average density of the piezoelectric substrate. In thecase where the groove angle is less than about 90°, the stop band can beincreased by specifying the average density of the portion, which islocated in the groove, of the IDT electrode to be higher than theaverage density of the piezoelectric substrate.

In another preferred embodiment of the present invention, at least someportion of the portion of the IDT electrode located in the groove ismade of at least one type of metal selected from the group consisting ofPt, Au, W, Ta, Mo, Ni, and Cu or an alloy containing at least one typeof metal selected from the group consisting of Pt, Au, W, Ta, Mo, Ni,and Cu.

In another preferred embodiment of the present invention, the IDTelectrode preferably includes a laminate of a plurality of electrodelayers, and a resistivity of at least one layer of the plurality ofelectrode layers is about 5 μΩcm or less, for example. As a result, theinsertion loss can be further reduced because the resistance of the IDTelectrode can be reduced.

In another preferred embodiment of the present invention, the electrodelayer having a resistivity of about 5 μΩcm or less is made of at leastone type of metal selected from the group consisting of Al, Cu, Au, andAg or an alloy containing at least one type of metal selected from thegroup consisting of Al, Cu, Au, and Ag.

In another preferred embodiment of the present invention, the IDTelectrode preferably includes a laminate of a plurality of electrodelayers, and a diffusion preventing film is disposed in at least one of alocation between the IDT electrode and the bottom of the groove and alocation between the electrode layers adjacent to each other. Accordingto this configuration, diffusion of an electrode material between theelectrode layers can be prevented. Furthermore, the adhesion between theelectrode layers adjacent to each other can be enhanced.

In another preferred embodiment of the present invention, the diffusionpreventing film is made of at least one type of metal selected from thegroup consisting of Ti, Ni, Cr, and Ta or an alloy containing at leastone type of metal selected from the group consisting of Ti, Ni, Cr, andTa.

In another preferred embodiment of the present invention, thepiezoelectric substrate is made of LiTaO₃, for example.

In another preferred embodiment of the present invention, the IDTelectrode includes a first electrode layer, which is located in thegroove of the piezoelectric substrate and which contains Pt, and asecond electrode layer, which is located outside the groove of thepiezoelectric substrate and which contains Al, the first dielectriclayer is made of silicon oxide, and θ of the Euler Angles (φ,θ,φ) andthe groove angle γ are within the range specified in Tables 1 to 4 belowand each of φ and φ of the Euler Angles is within the range of 0°±5°,where the Euler Angles of the piezoelectric substrate are specified tobe (φ,θ,φ) and the groove angle is specified to be γ. According to thisconfiguration, in the case where the piezoelectric substrate is made ofLiTaO₃, the stop band can be further increased.

TABLE 1 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30124 < θ ≦ 128 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 37.1 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.539.5 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 37.7 ≦ γ < 90.0  7.5 < Al ≦12.5 32.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5 29.9 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 52.1 ≦ γ < 90.0  7.5 < Al ≦ 12.5 57.5 ≦ γ < 90.0 12.5 < Al ≦17.5 62.8 ≦ γ < 90.0 128 < θ ≦ 132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 19.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 32.1 ≦ γ < 90.012.5 < Al ≦ 17.5 34.8 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 38.7 ≦ γ <90.0  7.5 < Al ≦ 12.5   34 ≦ γ < 90.0 12.5 < Al ≦ 17.5   30 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 49.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5 50.3 ≦ γ < 90.012.5 < Al ≦ 17.5 50.8 ≦ γ < 90.0 132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.510.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 27.9≦ γ < 90.0 12.5 < Al ≦ 17.5   27 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5  40 ≦ γ < 90.0  7.5 < Al ≦ 12.5   35 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.7 ≦γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 49.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2≦ γ < 90.0 12.5 < Al ≦ 17.5 47.4 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5< Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.0 ≦ γ < 90.0  7.5 < Al≦ 12.5 32.5 ≦ γ < 90.0 12.5 < Al ≦ 17.5 37.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 <Al ≦ 7.5 41.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 38.4 ≦ γ < 90.0 12.5 < Al ≦17.5   35 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 49.7 ≦ γ < 90.0  7.5 < Al≦ 12.5 49.8 ≦ γ < 90.0 12.5 < Al ≦ 17.5 49.5 ≦ γ < 90.0

TABLE 2 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 41.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.9 ≦ γ < 90.0 12.5 < Al ≦ 17.546.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 46.6 ≦ γ < 90.0  7.5 < Al ≦12.5 41.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 38.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 51.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2 ≦ γ < 90.0 12.5 < Al ≦17.5   41 ≦ γ < 90.0 30 < h < λ ≦ 50 124 < θ ≦ 128 1 < Pt ≦ 3 2.5 < Al ≦7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.510.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.8 ≦ γ < 90.0  7.5 < Al ≦12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 <Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5 34.2 ≦ γ < 90.0 12.5 < Al ≦17.5 32.6 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.2 ≦ γ < 90.0  7.5 < Al≦ 12.5 58.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.0 ≦ γ < 90.0 128 < θ ≦ 132 1< Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.012.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5   20 ≦ γ <90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5< Pt ≦ 7 2.5 < Al ≦ 7.5 39.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.3 ≦ γ < 90.012.5 < Al ≦ 17.5 33.2 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.9 ≦ γ <90.0  7.5 < Al ≦ 12.5 48.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5 41.2 ≦ γ < 90.0132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 20.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 36.9 ≦ γ < 90.0  7.5 < Al ≦12.5 35.8 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.4 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 38.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.2 ≦ γ < 90.0 12.5 < Al ≦17.5 37.4 ≦ γ < 90.0

TABLE 3 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 30 < h < λ ≦ 50136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 22.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.3 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 40.5 ≦ γ < 90.0  7.5 < Al ≦12.5 30.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.3 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5   46 ≦ γ < 90.0  7.5 < Al ≦ 12.5   45 ≦ γ < 90.0 12.5 < Al ≦17.5 36.3 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5   19 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 26.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 22.7 ≦ γ < 90.012.5 < Al ≦ 17.5 18.1 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 41.8 ≦ γ <90.0  7.5 < Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 40.7 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 46.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.1 ≦ γ < 90.012.5 < Al ≦ 17.5 45.7 ≦ γ < 90.0 50 < h < λ ≦ 70 124 < θ ≦ 128 1 < Pt ≦3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 <Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 56.8 ≦ γ < 90.0  7.5< Al ≦ 12.5 46.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 36.5 ≦ γ < 90.0 5 < Pt ≦ 72.5 < Al ≦ 7.5 33.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 29.4 ≦ γ < 90.0 12.5 <Al ≦ 17.5 26.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 57.2 ≦ γ < 90.0  7.5< Al ≦ 12.5 51.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.9 ≦ γ < 90.0 128 < θ ≦132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ< 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 54.1 ≦γ < 90.0  7.5 < Al ≦ 12.5 40.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 35.8 ≦ γ <90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 48.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 40.6 ≦ γ< 90.0 12.5 < Al ≦ 17.5 53.7 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 51.6 ≦γ < 90.0  7.5 < Al ≦ 12.5 50.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5   46 ≦ γ <90.0

TABLE 4 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 50 < h < λ ≦ 70132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 18.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 42.6 ≦ γ < 90.0 12.5 < Al ≦ 17.527.6 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.2 ≦ γ < 90.0  7.5 < Al ≦12.5 32.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5   43 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 44.6 ≦ γ < 90.0  7.5 < Al ≦ 12.5 49.9 ≦ γ < 90.0 12.5 < Al ≦17.5 45.2 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 19.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.012.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.4 ≦ γ <90.0  7.5 < Al ≦ 12.5   33 ≦ γ < 90.0 12.5 < Al ≦ 17.5 30.1 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5   48 ≦ γ < 90.012.5 < Al ≦ 17.5   44 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.510.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 26.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.4≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5  45 ≦ γ < 90.0  7.5 < Al ≦ 12.5 43.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.5 ≦γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 48.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 48.1≦ γ < 90.0 12.5 < Al ≦ 17.5   48 ≦ γ < 90.0

In another preferred embodiment of the present invention, thepiezoelectric substrate is made of LiNbO₃, for example.

In another preferred embodiment of the present invention, the followingrelationships −5°≦φ≦+5°, +80°≦θ≦+130°, −10°≦φ≦+10°, and 10°≦γ<90° aresatisfied, where the Euler Angles of the piezoelectric substrate arespecified to be (φ,θ,φ) and the groove angle is specified to be γ.Regarding this configuration, in the case where the piezoelectricsubstrate is made of LiNbO₃ and a boundary acoustic wave in a SH (ShearHorizontal) mode is utilized, the stop band can be further increased.

In another preferred embodiment of the present invention, the followingrelationships −5°≦φ≦+5°, +200°≦θ≦+250°, −10°≦φ≦+10°, and 10°≦γ<90° aresatisfied, where the Euler Angles of the piezoelectric substrate arespecified to be (φ,θ,φ) and the groove angle is specified to be γ.Regarding this configuration, in the case where the piezoelectricsubstrate is made of LiNbO₃ and a boundary acoustic wave in a Stoneleymode is utilized, the stop band can be further increased.

In another preferred embodiment of the present invention, the grooveangle is preferably within the range of about 10° or more and about 80°or less. Regarding this configuration, the acoustic velocity can befurther increased.

According to various preferred embodiments of the present invention, aboundary acoustic wave device including a piezoelectric substrate, afirst dielectric layer disposed on the piezoelectric substrate, and anIDT electrode disposed at a boundary between the piezoelectric substrateand the first dielectric layer, a groove angle of a groove in thepiezoelectric substrate, in which at least a portion of the IDTelectrode is embedded, is preferably less than about 90 degrees and,thereby, the acoustic velocity can be further increased.

The above and other elements, features, steps, characteristics andadvantages of the present invention will become more apparent from thefollowing detailed description of the preferred embodiments withreference to the attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic plan view of a boundary acoustic wave deviceaccording to a preferred embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view of a boundary acoustic wavedevice.

FIG. 3 is a graph showing the relationship between the groove angle γand the acoustic velocity of a boundary acoustic wave in the case wherean IDT electrode is made of Al.

FIG. 4 is a graph showing the relationship between the groove angle γand the acoustic velocity of a boundary acoustic wave in the case wherean IDT electrode is made of Pt.

FIG. 5 is a graph showing the relationship between the groove angle γand the stop band in the case where an IDT electrode is made of Al.

FIG. 6 is a graph showing the relationship between the groove angle γand the stop band in the case where an IDT electrode is made of Pt.

FIG. 7 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a first modified preferred embodiment of the presentinvention.

FIG. 8 is a graph showing the relationship between the groove angle γand the stop band, where the film thickness of a first electrode layernormalized by the wave length is about 1%, the film thickness of aportion, which is located in a groove 10 a, of a second electrode layernormalized by the wave length is about 5%, and the film thickness of aportion, which is located outside the groove 10 a, of the secondelectrode layer normalized by the wave length is about 10%.

FIG. 9 is a graph showing the relationship between the groove angle γand the stop band, where the film thickness of a first electrode layernormalized by the wave length is about 3%, the film thickness of aportion, which is located in a groove 10 a, of a second electrode layernormalized by the wave length is about 3%, and the film thickness of aportion, which is located outside the groove 10 a, of the secondelectrode layer normalized by the wave length is about 10%.

FIG. 10 is a graph showing the relationship between the groove angle γand the stop band, where the film thickness of a first electrode layernormalized by the wave length is about 5%, the film thickness of aportion, which is located in a groove 10 a, of a second electrode layernormalized by the wave length is about 1%, and the film thickness of aportion, which is located outside the groove 10 a, of the secondelectrode layer normalized by the wave length is about 10%.

FIG. 11 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a second modified preferred embodiment of the presentinvention.

FIG. 12 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a third modified preferred embodiment of the presentinvention.

FIG. 13 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a fourth modified preferred embodiment of the presentinvention.

FIG. 14 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a fifth modified preferred embodiment of the presentinvention.

FIG. 15 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a sixth modified preferred embodiment of the presentinvention.

FIG. 16 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a seventh modified preferred embodiment of the presentinvention.

FIG. 17 is a magnified schematic cross-sectional view of a portion of anIDT electrode in an eighth modified preferred embodiment of the presentinvention.

FIG. 18 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 19 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 20 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 21 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 22 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 23 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 24 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 25 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 26 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 27 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 28 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 29 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 30 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 31 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 32 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 33 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 34 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 35 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 36 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 37 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 20%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 38 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 39 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 40 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment, where aLiTaO₃ substrate having Euler Angles of)(0°, 126°, 0°) is used as thepiezoelectric substrate, the film thickness of Pt normalized by the wavelength is about 6%, the film thickness of Al normalized by the wavelength is about 5%, about 10%, or about 15%, the film thickness of SiO₂normalized by the wave length is about 40%, the film thickness of SiNnormalized by the wave length is about 100%, and the film thickness ofTi between the individual layers normalized by the wave length is about10%.

FIG. 41 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 42 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 43 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 44 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 45 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 46 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 47 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 48 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 49 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 50 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 51 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment, where aLiTaO₃ substrate having Euler Angles of (0°, 138°, 0°) is used as thepiezoelectric substrate, the film thickness of Pt normalized by the wavelength is about 4%, the film thickness of Al normalized by the wavelength is about 5%, about 10%, or about 15%, the film thickness of SiO₂normalized by the wave length is about 40%, the film thickness of SiNnormalized by the wave length is about 100%, and the film thickness ofTi between the individual layers normalized by the wave length is about10%.

FIG. 52 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO3 substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO2 normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 53 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 54 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 55 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 56 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 57 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 40%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 58 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 59 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 60 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,126°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 61 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Anglesof)(0°,126°,0°) is used as the piezoelectric substrate, the filmthickness of Pt normalized by the wave length is about 8%, the filmthickness of Al normalized by the wave length is about 5%, about 10%, orabout 15%, the film thickness of SiO₂ normalized by the wave length isabout 60%, the film thickness of SiN normalized by the wave length isabout 100%, and the film thickness of Ti between the individual layersnormalized by the wave length is about 10%.

FIG. 62 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 63 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 64 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 65 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,130°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 66 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 67 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment, where aLiTaO₃ substrate having Euler Angles of)(0°, 134°, 0°) is used as thepiezoelectric substrate, the film thickness of Pt normalized by the wavelength is 4%, the film thickness of Al normalized by the wave length is5%, 10%, or 15%, the film thickness of SiO₂ normalized by the wavelength is 60%, the film thickness of SiN normalized by the wave lengthis 100%, and the film thickness of Ti between the individual layersnormalized by the wave length is about 10%.

FIG. 68 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 69 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,134°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 70 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 2%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 71 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 72 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 73 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,138°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 74 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment, where aLiTaO₃ substrate having Euler Angles of)(0°, 142°, 0°) is used as thepiezoelectric substrate, the film thickness of Pt normalized by the wavelength is about 2%, the film thickness of Al normalized by the wavelength is about 5%, about 10%, or about 15%, the film thickness of SiO₂normalized by the wave length is about 60%, the film thickness of SiNnormalized by the wave length is about 100%, and the film thickness ofTi between the individual layers normalized by the wave length is about10%.

FIG. 75 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 4%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 76 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 6%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 77 is a graph showing the relationship between the groove angle γand the stop band in the eighth modified preferred embodiment of thepresent invention, where a LiTaO₃ substrate having Euler Angles of)(0°,142°, 0°) is used as the piezoelectric substrate, the film thickness ofPt normalized by the wave length is about 8%, the film thickness of Alnormalized by the wave length is about 5%, about 10%, or about 15%, thefilm thickness of SiO₂ normalized by the wave length is about 60%, thefilm thickness of SiN normalized by the wave length is about 100%, andthe film thickness of Ti between the individual layers normalized by thewave length is about 10%.

FIG. 78 is a magnified schematic cross-sectional view of a portion of anIDT electrode of a boundary acoustic wave device described in WO2008/044411 A1.

FIG. 79 is a magnified schematic cross-sectional view of a portion of anIDT electrode in a ninth modified preferred embodiment of the presentinvention.

FIG. 80 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,85°,0).

FIG. 81 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,95°,0).

FIG. 82 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,105°,0).

FIG. 83 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,115°,0).

FIG. 84 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,125°,0).

FIG. 85 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,205°,0).

FIG. 86 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,215°,0).

FIG. 87 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,225°,0).

FIG. 88 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,235°,0).

FIG. 89 shows the relationship between the groove angle (γ) and the stopband, where the cross-sectional shape is as shown in FIG. 17 and thepiezoelectric substrate is formed from a LiNbO₃ substrate having EulerAngles of (0,245°,0).

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will be made clear by explaining preferredembodiments below with reference to drawings.

FIG. 1 is a schematic plan view of a boundary acoustic wave deviceaccording to the present preferred embodiment. FIG. 2 is a schematiccross-sectional view of the boundary acoustic wave device according tothe present preferred embodiment. As shown in FIG. 2, a boundaryacoustic wave device 1 preferably is a so-called three-media boundaryacoustic wave device and is provided with a piezoelectric substrate 10and first and second dielectric layers 11 and 12.

The piezoelectric substrate 10 is not specifically limited insofar as itis formed from a piezoelectric material. The piezoelectric substrate 10can be made of, for example, a LiNbO₃ substrate or a LiTaO₃ substrate.

A first dielectric layer 11 is disposed on the piezoelectric substrate10. A second dielectric layer 12 is disposed on the first dielectriclayer 11. The acoustic velocity of the second dielectric layer 12 islarger than the acoustic velocity of the first dielectric layer 11.

The materials for the first and second dielectric layers 11 and 12 arenot specifically limited insofar as the acoustic velocity of the seconddielectric layer 12 is larger than the acoustic velocity of the firstdielectric layer 11. For example, the first and second dielectric layers11 and 12 can be made of aluminum nitride, e.g., AlN, besides siliconoxides, e.g., SiO₂, silicon nitrides, e.g., SiN, and the like.

More specifically, for example, the first dielectric layer 11 can bemade of silicon oxides, e.g., SiO₂, and the second dielectric layer 12can be made of a silicon nitride, e.g., SiN, or an aluminum nitride,e.g., AlN.

An IDT electrode 13 is disposed at the boundary between thepiezoelectric substrate 10 and the first dielectric layer 11. At least aportion of the IDT electrodes 13 are located in a plurality of grooves10 a disposed in the piezoelectric substrate 10. That is, at least aportion of the IDT electrodes 13 are embedded in a plurality of grooves10 a disposed in the piezoelectric substrate 10. Specifically, in thepresent preferred embodiment, the whole IDT electrode 13 is embedded inthe groove 10 a. The surface of the IDT electrode 13 is preferably flushwith the surface 10 b of the piezoelectric substrate 10.

As shown in FIG. 1, in the present preferred embodiment, the IDTelectrode 13 includes first to third IDT electrodes 13A, 13B, and 13C,each preferably defined by a pair of comb-shaped electrodes which areinterdigitated with each other. The first to the third IDT electrodes13A, 13B, and 13C are arranged along the propagation direction of theboundary acoustic wave. Grating reflectors 14 and 15 are disposed onboth sides of the first to the third IDT electrodes 13A, 13B, and 13C inthe propagation direction of the boundary acoustic wave. These gratingreflectors 14 and 15 are also embedded in the groove 10 a disposed inthe piezoelectric substrate 10.

As shown in FIG. 2, the cross-sectional shape of the groove 10 a, inwhich the IDT electrode 13 is embedded, is specified to be a shapehaving a width which decreases with decreasing away from the surface 10b of the piezoelectric substrate 10. In the present preferredembodiment, the cross-sectional shape of the groove 10 a is preferablynearly trapezoidal. In this regard, among the angles formed by an upperend portion, which is located on the surface 10 b side of thepiezoelectric substrate 10, of the inside surface of the groove 10 awith the surface 10 b of the piezoelectric substrate 10, the size of anangle (groove angle) γ located on the side inside the groove 10 a isspecified to be less than about 90 degrees, for example. Consequently,the acoustic velocity of the boundary acoustic wave generated in the IDTelectrode 13 is increased, as described below.

FIG. 3 is a graph showing the relationship between the groove angle γand the acoustic velocity of a boundary acoustic wave in the case wherethe IDT electrode 13 is made of Al. As is clear from the results shownin FIG. 3, the acoustic velocity of the boundary acoustic wave can beincreased as compared with that in the case where the groove angle isabout 90° by setting the groove angle γ to be less than about 90°.Furthermore, it is clear that in the case where the IDT electrode 13disposed in the groove 10 a is made of Al having a low density, theacoustic velocity of the boundary acoustic wave increases linearfunctionally as the groove angle γ decreases.

FIG. 4 is a graph showing the relationship between the groove angle γand the acoustic velocity of a boundary acoustic wave in the case wherethe IDT electrode γ is preferably made of Pt. As is clear from theresults shown in FIG. 4, in the case where the IDT electrode γ is madeof Pt as well, the acoustic velocity of the boundary acoustic wave canalso be increased as compared with that in the case where the grooveangle is about 90° by setting the groove angle γ to be less than about90°. However, it is clear that in the case where the IDT electrode 13disposed in the groove 10 a is made of Pt having a high density, therate of change in acoustic velocity of the boundary acoustic waverelative to a decrease in groove angle γ tends to increase as the grooveangle γ decreases. If the groove angle γ is larger than about 80°, theacoustic velocity of the boundary acoustic wave does not increasesignificantly as the groove angle γ decreases. On the other hand, if thegroove angle γ is about 80° or less, the acoustic velocity of theboundary acoustic wave increases significantly as the groove angle γdecreases.

From these results, the acoustic velocity of the boundary acoustic wavecan be increased as compared with that in the case where the grooveangle γ is about 90° by setting the groove angle γ to be less than about90° regardless of the type of the IDT electrode 13. In this regard, itis preferable that the groove angle γ is about 80° or less, for example.The acoustic velocity of the boundary acoustic wave can be increasedsignificantly regardless of the type of the IDT electrode 13 by settingthe groove angle γ to be about 80° or less.

The lower limit of the groove angle γ is not specifically limited withrespect to the relationship with the acoustic velocity of the boundaryacoustic wave. However, the lower limit of the groove angle γ is, forexample, preferably about 10°, preferably about 30°, preferably about45°, and more preferably about 55°.

The design parameters of the boundary acoustic wave devices whichexhibit the acoustic velocities of the boundary acoustic wave shown inFIGS. 3 and 4 are as described below.

Piezoelectric substrate 10: LiTaO₃ substrate having rotation angles of(0,138°,0)

Electrode finger ratio (duty) of IDT electrode 13: 0.5

First dielectric layer 11: SiO₂ layer (film thickness normalized by wavelength: 40%)

Second dielectric layer 12: SiN layer (film thickness normalized by wavelength: 100%)

Next, regarding the case shown in FIG. 3 where the IDT electrode 13 ismade of Al, the relationship between the groove angle and the stop bandwill be described. The results thereof are shown in FIG. 5. Likewise,regarding the case shown in FIG. 4 where the IDT electrode 13 is made ofPt, the relationship between the groove angle and the stop band will bedescribed. The results thereof are shown in FIG. 6.

As shown in FIG. 5, in the case where the IDT electrode 13 is made of Alhaving a low density, the stop band tends to become small as the grooveangle γ becomes small. In the case where the IDT electrode 13 is made ofAl having a low density, the stop band tends to linear functionallybecome small as the groove angle γ becomes small.

On the other hand, in the case where the IDT electrode 13 is made of Pthaving a high density and the groove angle is less than about 90°, thestop band tends to become larger than that in the case where the grooveangle γ is about 90°.

As is clear from these results, the stop band can be increased while theacoustic velocity of the boundary acoustic wave is increased byspecifying the groove angle γ to be less than about 90° and, inaddition, forming the IDT electrode 13 of a high-density, electricallyconductive material, e.g., Pt.

In this regard, as is clear from the results shown in FIG. 6, in thecase where the IDT electrode 13 is made of Pt having a high density, theacoustic velocity of the boundary acoustic wave does not linearfunctionally increase as the groove angle γ decreases. In the range ofthe groove angle γ of about 90° to about 70°, the stop band tends toincrease monotonously as the groove angle γ decreases, although in therange of the groove angle γ less than about 70°, the stop band tends todecrease monotonously as the groove angle γ decreases. However, even inthe case where the groove angle γ is about 55°, the stop band is largerthan that in the case where the groove angle γ is about 90°. Therefore,it is clear that in the case where the IDT electrode 13 is made of Pt,in order to increase the stop band, the groove angle γ is preferablyless than about 90° and about 55° or more, and further preferably about70°.

Next, the relationship between the electrode density of the IDTelectrode 13 and the stop band was determined. In each of the case wherethe groove angle γ is about 60° and the case where the groove angle γ isabout 90°, when the average density of the IDT electrode 13 is changedvariously, the relationship with the size of the stop band is shown inTable 5 described below.

TABLE 5 Density of IDT electrode 13 Stop band (g/cm³) Groove angle γ =60° Groove angle γ = 90° 2.69 1.873 1.960 4.54 1.500 1.735 8.93 0.4440.360 16.6 6.278 6.217 21.37 10.411 10.368

As shown in Table 5 described above, in the case where the averagedensity of the IDT electrode 13 is smaller than the density (about 7.45g/cm³) of the piezoelectric substrate 10 (LiTaO₃ substrate), the stopband in the case where the groove angle γ was about 90° was larger thanthat in the case where the groove angle γ was about 60°. On the otherhand, in the case where the average density of the IDT electrode 13 islarger than the density (about 7.45 g/cm³) of the piezoelectricsubstrate 10, the stop band in the case where the groove angle γ wasabout 60° was larger than that in the case where the groove angle γ wasabout 90°. As is clear from these results, in the case where the IDTelectrode 13 is embedded in the groove 10 a completely and the surfaceof the IDT electrode 13 is flush with the surface 10 b of thepiezoelectric substrate 10, the effect that the stop band is increasedby reducing the groove angle γ is obtained when the average density ofthe IDT electrode 13 is larger than the average density of thepiezoelectric substrate 10. That is, it is clear that the stop band canbe increased while the acoustic velocity of the boundary acoustic waveis increased by making the average density of the IDT electrode 13larger than the average density of the piezoelectric substrate 10 and,in addition, specifying the groove angle γ to be less than about 90°.

Therefore, the material for the IDT electrode 13 located in the groove10 a is not specifically limited insofar as the material is anelectrically conductive material. However, it is preferable that atleast a portion of the IDT electrode 13 is made of a high-density,electrically conductive material, e.g., one type of metal selected fromthe group consisting of Pt, Au, W, Ta, Mo, Ni, and Cu or an alloycontaining at least one type of metal selected from the group consistingof Pt, Au, W, Ta, Mo, Ni, and Cu.

The modified preferred embodiments of the above-described preferredembodiments will be described below. In this regard, in the followingexplanations, members having substantially the same functions as themembers in the above-described first preferred embodiment will beindicated by the same reference numerals as those set forth above andexplanations thereof will be omitted.

First Modified Preferred Embodiment

In the above-described first preferred embodiment, the example in whichthe whole IDT electrode 13 is embedded in the groove 10 a and the IDTelectrode 13 includes a single electrically conductive layer, isexplained. However, the present invention is not limited to thisconfiguration. For example, only a portion of the IDT electrode 13 maybe embedded in the groove 10 a and the other portion may be located onthe side upper than the surface 10 b of the piezoelectric substrate 10.Furthermore, the IDT electrode 13 may include a laminate of a pluralityof electrically conductive layers.

In the present modified preferred embodiment, as shown in FIG. 7, theIDT electrode 13 preferably includes an electrode layer laminate of afirst electrode layer 13 a, which is disposed on the piezoelectricsubstrate 10 in such a way that at least a portion thereof is located inthe groove 10 a, and a second electrode layer 13 b, which is laminatedon the first electrode layer 13 a. A portion of the IDT electrode 13 islocated on the side upper than the surface 10 b of the piezoelectricsubstrate 10. More specifically, the first electrode layer 13 a isdisposed in the groove 10 a. Then, a portion of the second electrodelayer 13 b is located in the groove 10 a, and the remainder portion islocated on the side upper than the surface 10 b of the piezoelectricsubstrate 10.

Alternatively, as shown in FIG. 79, a portion 13Y, which is locatedoutside the groove 10 a, of the IDT electrode 13 may taper withdecreasing distance away from the piezoelectric substrate 10. In theexample shown in FIG. 79, the cross-sectional shape of the portion 13Y,which is located outside the groove 10 a, of the IDT electrode 13preferably has a nearly trapezoidal shape in which the length T of theupper base is smaller than the length R of the lower base.

As shown in FIG. 79, the portion 13Y, which is located outside thegroove 10 a, of the IDT electrode 13 is specified to have a taperedshape and, thereby, a gap is not formed easily between the firstdielectric layer 11 and the IDT electrode 13. Therefore, scattering of aboundary acoustic wave due to formation of a gap between the firstdielectric layer 11 and the IDT electrode 13 can be suppressed. As aresult, degradation in characteristics, e.g., an insertion loss, can besuppressed.

Meanwhile, in the case where the first dielectric layer 11 is made ofsilicon oxide, degradation in temperature characteristics of frequencydue to formation of a gap between the first dielectric layer 11 and theIDT electrode 13 can also be suppressed.

In this regard, the cross-sectional shape of the portion 13Y, which islocated outside the groove 10 a, of the IDT electrode 13 is not limitedto the nearly trapezoidal shape and may be a semi-elliptic shape, asemi-oval shape, a triangular shape, or the like.

The first electrode layer 13 a is made of a material, e.g., at least onetype of metal selected from the group consisting of Pt, Au, W, Ta, Mo,Ni, and Cu or an alloy containing at least one type of metal selectedfrom the group consisting of Pt, Au, W, Ta, Mo, Ni, and Cu, having adensity higher than the piezoelectric substrate 10. Furthermore, theaverage density of a portion 13Z, which is located in the groove 10 a,of the IDT electrode 13 is specified to become higher than the averagedensity of the piezoelectric substrate 10. That is, the average densityof the first electrode layer 13 a and the portion, which is located inthe groove 10 a, of the second electrode layer 13 b is specified tobecome higher than the average density of the piezoelectric substrate10. Concretely, in the present preferred embodiment, the first electrodelayer is made of Pt, and the second electrode layer is made of Al.

Table 6 described below shows the average density of the portion 13Z,which is located in the groove 10 a, of the IDT electrode 13, where theratio of the thickness of the first electrode layer 13 a to thethickness of the portion, which is located in the groove 10 a, of thesecond electrode layer 13 b is changed variously.

Moreover, FIG. 8 shows the relationship between the groove angle γ andthe stop band, where the film thickness of the first electrode layer 13a normalized by the wave length is 1%, the film thickness of theportion, which is located in the groove 10 a, of the second electrodelayer 13 b normalized by the wave length is 5%, and the film thicknessof the portion, which is located outside the groove 10 a, of the secondelectrode layer 13 b normalized by the wave length is 10%.

FIG. 9 shows the relationship between the groove angle γ and the stopband, where the film thickness of the first electrode layer 13 anormalized by the wave length is 3%, the film thickness of the portion,which is located in the groove 10 a, of the second electrode layer 13 bnormalized by the wave length is 3%, and the film thickness of theportion, which is located outside the groove 10 a, of the secondelectrode layer 13 b normalized by the wave length is 10%.

FIG. 10 shows the relationship between the groove angle γ and the stopband, where the film thickness of the first electrode layer 13 anormalized by the wave length is 5%, the film thickness of the portion,which is located in the groove 10 a, of the second electrode layer 13 bnormalized by the wave length is 1%, and the film thickness of theportion, which is located outside the groove 10 a, of the secondelectrode layer 13 b normalized by the wave length is 10%.

In this regard, in FIG. 8 to FIG. 10, the graph indicated by “134°” isthe graph in the case where the LiTaO3 substrate having rotation anglesof)(0°, 134°, 0°) is used as the piezoelectric substrate 10. The graphindicated by “138°” is the graph in the case where the LiTaO3 substratehaving rotation angles of)(0°, 138°, 0°) is used as the piezoelectricsubstrate 10. The graph indicated by “142°” is the graph in the casewhere the LiTaO3 substrate having rotation angles of)(0°, 142°, 0°) isused as the piezoelectric substrate 10.

TABLE 6 First Portion, which is located Average electrode in groove 10a,of second density layer 13a electrode layer 13b (g/cm³) Density (g/cm³)21.5 2.7 Thickness (%) 1 5 5.41 2 4 8.29 3 3 11.34 4 2 14.56 5 1 17.95

As shown in Table 6 described above, in the case where the filmthickness of the first electrode layer 13 a normalized by the wavelength is 1% and the film thickness of the portion, which is located inthe groove 10 a, of the second electrode layer 13 b normalized by thewave length is 5%, the average density of the portion, which is locatedin the groove 10 a, of the IDT electrode 13 is 5.41 g/cm³ and is smallerthan the density (7.45 g/cm³) of the piezoelectric substrate 10 (LiTaO₃substrate). In this case, as shown in FIG. 8, the stop band is thelargest when the groove angle γ is 90°, and the stop band tends tobecome small as the groove angle γ becomes small from 90°.

As shown in Table 6 described above, in the case where the filmthickness of the first electrode layer 13 a normalized by the wavelength is 3% and the film thickness of the portion, which is located inthe groove 10 a, of the second electrode layer 13 b normalized by thewave length is 3%, the average density of the portion, which is locatedin the groove 10 a, of the IDT electrode 13 is 11.34 g/cm³ and is largerthan the density (7.45 g/cm³) of the piezoelectric substrate 10 (LiTaO₃substrate). Likewise, in the case where the film thickness of the firstelectrode layer 13 a normalized by the wave length is 5% and the filmthickness of the portion, which is located in the groove 10 a, of thesecond electrode layer 13 b normalized by the wave length is 1%, theaverage density of the portion, which is located in the groove 10 a, ofthe IDT electrode 13 is 17.95 g/cm³ and is larger than the density (7.45g/cm³) of the piezoelectric substrate 10 (LiTaO₃ substrate). In thesecases, as shown in FIG. 9 and FIG. 10, it is clear that the stop bandcan be made larger than the stop band in the case where the groove angleγ is specified to be 90° by specifying the groove angle γ to be lessthan 90°.

As is clear from these results, in the case where the IDT electrode 13is formed from the electrically conductive layer laminate as well, thestop band can be increased while the acoustic velocity of the boundaryacoustic wave is increased by making the average density of the portion13Z, which is located in the groove 10 a, of the IDT electrode 13 largerthan the average density of the piezoelectric substrate 10. Furthermore,as is also clear, the effect that the stop band can be increased whilethe acoustic velocity of the boundary acoustic wave is increased bymaking the average density of the portion 13Z, which is located in thegroove 10 a, of the IDT electrode 13 larger than the average density ofthe piezoelectric substrate 10 is obtained likewise in the case whereonly a part of the IDT electrode 13 is located in the groove 10 a andthe other portion is located on the side upper than the surface 10 b ofthe piezoelectric substrate 10.

In this regard, the material for the second electrode layer 13 b is notspecifically limited insofar as the material is an electricallyconductive material. The material for the second electrode layer 13 bmay have a density higher than the density of the piezoelectricsubstrate 10 or be lower than that. For example, the second electrodelayer 13 b may be made of a material, e.g., at least one type of metalselected from the group consisting of Al, Ag, Pt, Au, W, Ta, Mo, Ni, andCu or an alloy containing at least one type of metal selected from thegroup consisting of Al, Ag, Pt, Au, W, Ta, Mo, Ni, and Cu, having adensity higher than that of the piezoelectric substrate 10.

However, if the electrical resistivity of the IDT electrode 13increases, the insertion loss of the boundary acoustic wave devicebecomes large. Therefore, it is preferable that the second electrodelayer 13 b is made of a metal or an alloy having a low electricalresistivity. The electrical resistivity of the second electrode layer 13b is preferably 5 μΩcm or less. Consequently, it is preferable that thesecond electrode layer 13 b is made of a low-resistivity material, e.g.,at least one type of metal selected from the group consisting of Al, Cu,Au, and Ag or an alloy containing at least one type of metal selectedfrom the group consisting of Al, Cu, Au, and Ag.

Next, regarding the structure having a cross-sectional shape shown inFIG. 17, the relationships among θ of the Euler Angles (φ,θ,φ) of thepiezoelectric substrate 10, the groove angle γ, and the stop band wereexamined, where the piezoelectric substrate 10 was made of LiTaO₃.

As shown in FIG. 17, regarding the boundary acoustic wave deviceproduced in the present experiment, the IDT electrode 13 was formed froma laminate in which a first diffusion preventing film 13 c, a firstelectrode layer 13 a, a second diffusion preventing film 13 d, a secondelectrode layer 13 b, and a third diffusion preventing film 13 e werelaminated in that order from the piezoelectric substrate 10 side. Eachof the first to the third diffusion preventing films 13 c to 13 e wasmade of a Ti film having a film thickness normalized by the wave lengthof 0.5%. The first electrode layer 13 a was made of a Pt film having afilm thickness normalized by the wave length of 2%, 4%, 6%, or 8%. Thesecond electrode layer 13 b was made of an Al film having a filmthickness normalized by the wave length of 5%, 10%, or 15%. In thisregard, the first diffusion preventing film 13 c and the first electrodelayer 13 a were located in the groove 10 a, and the other portions werelocated outside the groove 10 a. The first dielectric layer 11 was madeof a SiO₂ film having a film thickness normalized by the wave length of20%, 40%, or 60%, and the second dielectric film 12 was made of a SiNfilm having a film thickness normalized by the wave length of 100%.

FIG. 18 to FIG. 77 show the relationship between the groove angle γ andthe stop band, where the piezoelectric substrate was made of a LiTaO₃substrate having Euler Angles of (0°, 126° to 142°, 0°), the filmthickness of Pt normalized by the wave length was 2%, 4%, 6%, or 8%, thefilm thickness of Al normalized by the wave length was 5%, 10%, or 15%,and the film thickness of SiO₂ normalized by the wave length was 20%,40%, or 60%.

Moreover, approximate expressions of the data under the individualconditions shown in FIG. 18 to FIG. 77 were calculated by using themethod of least squares. In this regard, the approximate expression wasassumed to be a quadratic function (y=ax²±bx+c, where y represents astop band and x represents a groove angle). The values of a, b, and c inthe calculated approximate expressions of the data under the individualconditions are shown in Tables 7 to 11 described below.

Furthermore, on the basis of the resulting approximate expression, thesize of a stop band when the groove angle was 90° and the lower limitvalue of the groove angle of the region in which the stop band waslarger than or equal to the stop band when the groove angle was 90°,that is, the groove angle at which the stop band was equal to the stopband when the groove angle was 90° was calculated. The results thereofare also shown in Table 7 to Table 11 described below.

TABLE 7 Thickness Thickness Thickness Lower limit value of groove offirst of first of second Stop band angle of region in which Cutdielectric electrode electrode when stop band is larger than or anglelayer h/λ layer h/λ layer h/λ groove equal to stop band when (θ) [%] [%][%] a b c angle = 90° groove angle = 90° (°) 126 20 2 5 −5.014E−054.610E−03 3.538 3.547 1.942 126 40 2 5 −3.973E−05 2.005E−03 4.270 4.129−39.524 126 60 2 5 −2.388E−05 −5.770E−04 4.291 4.045 −114.163 126 20 210 −3.853E−05 2.947E−03 3.700 3.653 −13.523 126 40 2 10 −3.131E−054.957E−04 4.439 4.230 −74.166 126 60 2 10 −2.209E−05 −1.011E−03 4.4164.146 −135.775 126 20 2 15 −2.630E−05 −1.585E−03 3.302 2.946 −150.237126 40 2 15 −2.746E−05 −2.560E−04 4.545 4.299 −99.323 126 60 2 15−2.154E−05 −1.346E−03 4.504 4.208 −152.491 126 20 4 5 −1.512E−041.923E−02 6.922 7.427 37.144 126 40 4 5 −3.195E−04 3.478E−02 6.944 7.48618.837 126 60 4 5 −3.409E−04 5.006E−02 5.617 7.361 56.833 126 20 4 10−2.020E−04 2.623E−02 6.793 7.518 39.872 126 40 4 10 −5.129E−04 5.197E−026.639 7.163 11.334 126 60 4 10 −2.990E−04 4.073E−02 6.153 7.397 46.231126 20 4 15 −2.123E−04 2.749E−02 6.845 7.599 39.454 126 40 4 15−9.652E−04 9.178E−02 5.796 6.239 5.095 126 60 4 15 −2.350E−04 2.974E−026.625 7.398 36.540 126 20 6 5 −1.027E−03 1.311E−01 6.903 10.383 37.672126 40 6 5 −7.083E−04 9.295E−02 8.008 10.637 41.229 126 60 6 5−1.158E−03 1.433E−01 6.235 9.756 33.788 126 20 6 10 −1.271E−03 1.556E−016.404 10.111 32.408 126 40 6 10 −1.652E−03 2.052E−01 4.728 9.813 34.190126 60 6 10 −1.256E−03 1.500E−01 6.185 9.510 29.414 126 20 6 15−1.394E−03 1.672E−01 6.222 9.972 29.884 126 40 6 15 −1.264E−03 1.551E−016.332 10.046 32.641 126 60 6 15 −1.375E−03 1.596E−01 5.971 9.201 26.105126 20 8 5 −4.670E−04 6.634E−02 11.478 13.667 52.076 126 40 8 5−1.228E−03 1.832E−01 6.631 13.178 59.247 126 60 8 5 −1.191E−03 1.753E−016.679 12.807 57.175 126 20 8 10 −7.326E−04 1.080E−01 9.971 13.759 57.454126 40 8 10 −1.370E−03 2.032E−01 5.945 13.144 58.399 126 60 8 10−7.204E−04 1.022E−01 9.485 12.851 51.918 126 20 8 15 −4.069E−046.219E−02 11.640 13.941 62.841 126 40 8 15 −2.881E−03 3.499E−01 3.02911.188 31.470 126 60 8 15 −2.287E−03 2.972E−01 3.685 11.904 39.926

TABLE 8 Thickness Thickness Thickness Lower limit value of groove offirst of first of second Stop band angle of region in which Cutdielectric electrode electrode when stop band is larger than or anglelayer h/λ layer h/λ layer h/λ groove equal to stop band when (θ) [%] [%][%] a b c angle = 90° groove angle = 90° (°) 130 20 2 5 −3.946E−053.424E−03 3.498 3.487 −3.226 130 20 2 10 −3.586E−05 2.749E−03 3.6303.587 −13.339 130 20 2 15 −3.701E−05 2.742E−03 3.716 3.663 −15.903 13040 2 5 −3.188E−05 6.746E−04 4.265 4.068 −68.830 130 40 2 10 −2.679E−05−2.362E−04 4.407 4.168 −98.817 130 40 2 15 −2.430E−05 −7.477E−04 4.5024.238 −120.769 130 60 2 5 −2.180E−05 −8.558E−04 4.243 3.990 −129.263 13060 2 10 −2.024E−05 −1.232E−03 4.367 4.092 −150.859 130 60 2 15−1.888E−05 −1.566E−03 4.455 4.162 −172.968 130 20 4 5 −9.248E−051.011E−02 7.191 7.351 19.304 130 20 4 10 −1.409E−04 1.720E−02 7.0387.445 32.092 130 20 4 15 −1.685E−04 2.102E−02 6.993 7.521 34.771 130 404 5 −2.382E−04 2.619E−02 7.097 7.525 19.958 130 40 4 10 −4.294E−044.503E−02 6.712 7.285 14.848 130 40 4 15 −6.656E−04 6.600E−02 6.2836.832 9.160 130 60 4 5 −2.956E−04 4.260E−02 5.882 7.322 54.137 130 60 410 −2.327E−04 3.046E−02 6.505 7.362 40.903 130 60 4 15 −2.454E−043.086E−02 6.557 7.347 35.771 130 20 6 5 −9.138E−04 1.176E−01 7.21510.401 38.738 130 20 6 10 −1.123E−03 1.393E−01 6.762 10.205 34.046 13020 6 15 −1.349E−03 1.619E−01 6.289 9.933 30.027 130 40 6 5 −6.199E−048.046E−02 8.411 10.631 39.799 130 40 6 10 −8.738E−04 1.104E−01 7.57310.428 36.297 130 40 6 15 −8.290E−04 1.021E−01 7.902 10.378 33.190 13060 6 5 −4.802E−04 6.662E−02 8.329 10.436 48.749 130 60 6 10 −7.495E−049.790E−02 7.471 10.211 40.612 130 60 6 15 −2.921E−04 4.197E−02 9.12010.532 53.699 130 20 8 5 −6.017E−04 8.377E−02 10.895 13.561 49.232 13020 8 10 −1.514E−03 2.125E−01 6.478 13.335 50.320 130 20 8 15 −1.020E−031.436E−01 8.926 13.590 50.811 130 40 8 5 −1.371E−03 2.055E−01 5.75513.146 59.907 130 40 8 10 −8.385E−04 1.162E−01 9.484 13.154 48.632 13040 8 15 −6.586E−04 8.640E−02 10.683 13.124 41.178 130 60 8 5 −9.642E−041.365E−01 8.291 12.769 51.599 130 60 8 10 −8.254E−04 1.160E−01 9.02212.781 50.596 130 60 8 15 −5.505E−04 7.490E−02 10.490 12.772 46.049

TABLE 9 Thickness Thickness Thickness Lower limit value of groove offirst of first of second Stop band angle of region in which Cutdielectric electrode electrode when stop band is larger than or anglelayer h/λ layer h/λ layer h/λ groove equal to stop band when (θ) [%] [%][%] a b c angle = 90° groove angle = 90° (°) 134 20 2 5 −3.520E−052.970E−03 3.429 3.411 −5.624 134 40 2 5 −2.821E−05 2.517E−04 4.192 3.986−81.077 134 60 2 5 −1.969E−05 −1.094E−03 4.181 3.924 −145.579 134 20 210 −3.415E−05 2.643E−03 3.549 3.510 −12.618 134 40 2 10 −2.308E−05−6.724E−04 4.335 4.088 −119.139 134 60 2 10 −1.832E−05 −1.433E−03 4.3034.026 −168.228 134 20 2 15 −3.365E−05 2.470E−03 3.639 3.588 −16.587 13440 2 15 −2.165E−05 −1.030E−03 4.427 4.159 −137.565 134 60 2 15−1.703E−05 −1.730E−03 4.391 4.098 −191.581 134 20 4 5 −9.042E−059.811E−03 7.079 7.229 18.495 134 40 4 5 −1.862E−04 2.057E−02 7.148 7.49120.488 134 60 4 5 −4.328E−04 4.557E−02 6.245 6.840 15.282 134 20 4 10−1.171E−04 1.381E−02 7.033 7.327 27.895 134 40 4 10 −2.767E−04 2.960E−027.001 7.424 16.973 134 60 4 10 −3.342E−04 4.432E−02 5.979 7.261 42.606134 20 4 15 −1.179E−04 1.379E−02 7.122 7.408 26.985 134 40 4 15−4.279E−04 4.407E−02 6.694 7.194 12.979 134 60 4 15 −2.240E−04 2.635E−026.704 7.261 27.640 134 20 6 5 −7.885E−04 1.025E−01 7.538 10.379 40.024134 40 6 5 −4.789E−04 6.077E−02 9.027 10.618 36.904 134 60 6 5−9.441E−04 1.172E−01 6.927 9.832 34.187 134 20 6 10 −1.054E−03 1.318E−016.837 10.161 35.043 134 40 6 10 −6.395E−04 8.044E−02 8.458 10.518 35.787134 60 6 10 −9.782E−04 1.195E−01 6.920 9.754 32.178 134 20 6 15−1.163E−03 1.427E−01 6.650 10.071 32.694 134 40 6 15 −9.023E−041.114E−01 7.547 10.261 33.420 134 60 6 15 −5.839E−04 7.768E−02 7.98210.244 43.045 134 20 8 5 −1.029E−03 1.439E−01 8.718 13.333 49.832 134 408 5 −1.802E−03 2.316E−01 6.180 12.426 38.511 134 60 8 5 −1.663E−032.239E−01 5.724 12.402 44.614 134 20 8 10 −1.962E−03 2.534E−01 5.60712.522 39.151 134 40 8 10 −2.430E−03 3.067E−01 3.953 11.871 36.208 13460 8 10 −8.940E−04 1.251E−01 8.702 12.715 49.871 134 20 8 15 −1.453E−031.997E−01 7.050 13.252 47.435 134 40 8 15 −1.999E−03 2.547E−01 5.49612.225 37.404 134 60 8 15 −6.711E−04 9.073E−02 9.948 12.678 45.209

TABLE 10 Thickness Thickness Thickness Lower limit value of groove offirst of first of second Stop band angle of region in which Cutdielectric electrode electrode when stop band is larger than or anglelayer h/λ layer h/λ layer h/λ groove equal to stop band when (θ) [%] [%][%] a b c angle = 90° groove angle = 90° (°) 138 20 2 5 −3.200E−052.565E−03 3.353 3.324 −9.844 138 40 2 5 −5.260E−05 4.305E−03 3.918 3.880−8.156 138 60 2 5 −1.801E−05 −1.218E−03 4.103 3.847 −157.625 138 20 2 10−3.040E−05 2.278E−03 3.468 3.427 −15.068 138 40 2 10 −2.702E−051.746E−04 4.190 3.987 −83.538 138 60 2 10 −1.661E−05 −1.555E−03 4.2233.948 −183.664 138 20 2 15 −2.979E−05 2.123E−03 3.554 3.504 −18.741 13840 2 15 −2.239E−05 −7.013E−04 4.306 4.061 −121.326 138 60 2 15−1.532E−05 −1.845E−03 4.311 4.021 −210.441 138 20 4 5 −7.468E−057.958E−03 6.961 7.073 16.563 138 40 4 5 −1.649E−04 1.855E−02 7.067 7.40122.513 138 60 4 5 −2.783E−04 3.053E−02 6.508 7.002 19.695 138 20 4 10−1.115E−04 1.365E−02 6.847 7.173 32.489 138 40 4 10 −2.565E−04 2.803E−026.904 7.349 19.304 138 60 4 10 −6.118E−04 3.455E−03 7.418 7.233 −33.524138 20 4 15 −1.704E−04 2.169E−02 6.659 7.231 37.283 138 40 4 15−2.538E−04 2.683E−02 6.998 7.357 15.705 138 60 4 15 −1.039E−04 9.485E−037.211 7.224 1.302 138 20 6 5 −7.650E−04 1.004E−01 7.402 10.246 41.300138 40 6 5 −5.949E−04 7.764E−02 8.324 10.493 40.508 138 60 6 5−8.809E−04 1.095E−01 7.074 9.797 34.352 138 20 6 10 −8.485E−04 1.090E−017.289 10.223 38.407 138 40 6 10 −1.033E−03 1.247E−01 7.132 9.984 30.668138 60 6 10 −8.972E−04 1.104E−01 7.092 9.761 33.045 138 20 6 15−1.015E−03 1.269E−01 6.889 10.088 35.005 138 40 6 15 −5.068E−046.197E−02 8.982 10.454 32.282 138 60 6 15 −1.015E−03 1.219E−01 6.7819.530 30.100 138 20 8 5 −1.565E−03 2.187E−01 6.047 13.051 49.732 138 408 5 −1.334E−03 1.815E−01 7.384 12.910 46.016 138 60 8 5 −6.407E−048.409E−02 10.325 12.703 41.243 138 20 8 10 −1.303E−03 1.821E−01 7.35113.192 49.820 138 40 8 10 −1.284E−03 1.734E−01 7.681 12.886 45.024 13860 8 10 −1.159E−03 1.599E−01 7.556 12.559 47.975 138 20 8 15 −1.374E−031.916E−01 7.106 13.227 49.511 138 40 8 15 −1.957E−03 2.472E−01 5.68612.084 36.321 138 60 8 15 −7.031E−04 9.422E−02 9.816 12.600 43.993

TABLE 11 Thickness Thickness Thickness Lower limit value of groove offirst of first of second Stop band angle of region in which Cutdielectric electrode electrode when stop band is larger than or anglelayer h/λ layer h/λ layer h/λ groove equal to stop band when (θ) [%] [%][%] a b c angle = 90° groove angle = 90° (°) 142 20 2 5 −2.767E−052.108E−03 3.270 3.236 −13.808 142 40 2 5 −7.500E−05 8.176E−03 3.6233.752 19.022 142 60 2 5 −1.714E−05 −1.116E−03 4.004 3.760 −158.006 14220 2 10 −2.653E−05 1.881E−03 3.379 3.334 −19.109 142 40 2 10 −3.745E−052.205E−03 3.971 3.866 −31.118 142 60 2 10 −1.522E−05 −1.567E−03 4.1243.859 −192.937 142 20 2 15 −2.585E−05 1.771E−03 3.461 3.411 −21.493 14240 2 15 −2.586E−05 1.809E−04 4.137 3.944 −83.003 142 60 2 15 −1.378E−05−1.876E−03 4.213 3.932 −226.131 142 20 4 5 −9.928E−05 1.306E−02 6.5036.874 41.532 142 40 4 5 −1.573E−04 1.836E−02 6.898 7.277 26.742 142 60 45 −2.148E−04 2.498E−02 6.509 7.018 26.303 142 20 4 10 −1.399E−041.914E−02 6.385 6.975 46.866 142 40 4 10 −1.486E−04 1.674E−02 7.0417.344 22.693 142 60 4 10 −1.682E−04 1.840E−02 6.788 7.082 19.364 142 204 15 −1.508E−04 2.055E−02 6.427 7.055 46.258 142 40 4 15 −1.160E−041.254E−02 7.214 7.403 18.107 142 60 4 15 −1.159E−04 1.148E−02 7.0187.112 9.057 142 20 6 5 −8.279E−04 1.131E−01 6.641 10.110 46.556 142 40 65 −5.491E−04 7.239E−02 8.309 10.376 41.829 142 60 6 5 −4.923E−046.647E−02 8.120 10.114 45.022 142 20 6 10 −8.281E−04 1.091E−01 6.98510.096 41.746 142 40 6 10 −5.833E−04 7.580E−02 8.261 10.358 39.943 14260 6 10 −5.093E−04 6.782E−02 8.118 10.097 43.178 142 20 6 15 −1.007E−031.290E−01 6.520 9.969 38.054 142 40 6 15 −4.728E−04 6.178E−02 8.71010.441 40.669 142 60 6 15 −6.206E−04 8.039E−02 7.744 9.952 39.531 142 208 5 −1.358E−03 1.925E−01 6.587 12.918 51.802 142 40 8 5 −1.298E−031.776E−01 7.330 12.805 46.877 142 60 8 5 −1.260E−03 1.750E−01 6.94012.488 48.943 142 20 8 10 −2.695E−03 3.481E−01 2.263 11.763 39.168 14240 8 10 −1.286E−03 1.749E−01 7.459 12.790 46.073 142 60 8 10 −1.246E−031.721E−01 7.059 12.453 48.102 142 20 8 15 −1.976E−03 2.590E−01 5.03412.333 41.041 142 40 8 15 −1.317E−03 1.787E−01 7.322 12.741 45.733 14260 8 15 −1.223E−03 1.688E−01 7.108 12.392 47.985

Next, regarding the case where the piezoelectric substrate 10 was madeof a LiTaO₃ substrate, the range of the groove angle, in which the stopband was able to be made larger than the stop band when the groove anglewas 90°, was calculated from the results shown in Table 7 to Table 11and the range of the groove angles which were able to be formedphysically. The calculation results are shown in Tables 12 to 15described below.

Concretely, the lower limit of the groove angle in which thecross-sectional shape of the groove was trapezoidal was about 10°, wherethe depth of the groove normalized by the wave length was 2% and theduty was 0.4 to 0.6. Consequently, for example, in the case where thelower limit value of the groove angle of the region in which the stopband was larger than or equal to the stop band when the groove angle was90° was larger than 10°, the lower limit value of the groove angle ofthe region in which the stop band was larger than or equal to the stopband when the groove angle was 90° was adopted as the lower limit valueof the range of the groove angle in which the stop band was able tobecome larger than the stop band when the groove angle was 90°.Meanwhile, in the case where the lower limit value of the groove angleof the region in which the stop band was larger than or equal to thestop band when the groove angle was 90° was less than 10°, the lowerlimit value of the range of the groove angle in which the stop band wasable to become larger than the stop band when the groove angle was 90°was specified to be 10°.

As is clear from the above description, in the case where thepiezoelectric substrate 10 is made of the LiTaO₃ substrate, the stopband can be increased by specifying θ of the Euler Angles (φ,θ,φ) andthe groove angle γ to be within the range stipulated in Tables 12 to 15described below.

In this regard, each of φ and φ of the above-described data is specifiedto be 0°, and it is well known to a person skilled in the art that thedata with respect to 0° can be applied to the range of 0°±5° in general.

TABLE 12 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30124 < θ ≦ 128 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 37.1 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.539.5 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 37.7 ≦ γ < 90.0  7.5 < Al ≦12.5 32.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5 29.9 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 52.1 ≦ γ < 90.0  7.5 < Al ≦ 12.5 57.5 ≦ γ < 90.0 12.5 < Al ≦17.5 62.8 ≦ γ < 90.0 128 < θ ≦ 132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 19.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 32.1 ≦ γ < 90.012.5 < Al ≦ 17.5 34.8 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 38.7 ≦ γ <90.0  7.5 < Al ≦ 12.5   34 ≦ γ < 90.0 12.5 < Al ≦ 17.5   30 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 49.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5 50.3 ≦ γ < 90.012.5 < Al ≦ 17.5 50.8 ≦ γ < 90.0 132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.510.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 27.9≦ γ < 90.0 12.5 < Al ≦ 17.5   27 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5  40 ≦ γ < 90.0  7.5 < Al ≦ 12.5   35 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.7 ≦γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 49.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2≦ γ < 90.0 12.5 < Al ≦ 17.5 47.4 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5< Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.0 ≦ γ < 90.0  7.5 < Al≦ 12.5 32.5 ≦ γ < 90.0 12.5 < Al ≦ 17.5 37.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 <Al ≦ 7.5 41.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 38.4 ≦ γ < 90.0 12.5 < Al ≦17.5   35 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 49.7 ≦ γ < 90.0  7.5 < Al≦ 12.5 49.8 ≦ γ < 90.0 12.5 < Al ≦ 17.5 49.5 ≦ γ < 90.0

TABLE 13 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 41.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.9 ≦ γ < 90.0 12.5 < Al ≦ 17.546.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 46.6 ≦ γ < 90.0  7.5 < Al ≦12.5 41.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 38.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 51.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2 ≦ γ < 90.0 12.5 < Al ≦17.5   41 ≦ γ < 90.0 30 < h < λ ≦ 50 124 < θ ≦ 128 1 < Pt ≦ 3 2.5 < Al ≦7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.510.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.8 ≦ γ < 90.0  7.5 < Al ≦12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 <Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5 34.2 ≦ γ < 90.0 12.5 < Al ≦17.5 32.6 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.2 ≦ γ < 90.0  7.5 < Al≦ 12.5 58.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.0 ≦ γ < 90.0 128 < θ ≦ 132 1< Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.012.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5   20 ≦ γ <90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5< Pt ≦ 7 2.5 < Al ≦ 7.5 39.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.3 ≦ γ < 90.012.5 < Al ≦ 17.5 33.2 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.9 ≦ γ <90.0  7.5 < Al ≦ 12.5 48.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5 41.2 ≦ γ < 90.0132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 20.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 36.9 ≦ γ < 90.0  7.5 < Al ≦12.5 35.8 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.4 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 38.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.2 ≦ γ < 90.0 12.5 < Al ≦17.5 37.4 ≦ γ < 90.0

TABLE 14 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 30 < h < λ ≦ 50136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 22.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.3 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 40.5 ≦ γ < 90.0  7.5 < Al ≦12.5 30.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.3 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5   46 ≦ γ < 90.0  7.5 < Al ≦ 12.5   45 ≦ γ < 90.0 12.5 < Al ≦17.5 36.3 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5   19 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 26.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 22.7 ≦ γ < 90.012.5 < Al ≦ 17.5 18.1 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 41.8 ≦ γ <90.0  7.5 < Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 40.7 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 46.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.1 ≦ γ < 90.012.5 < Al ≦ 17.5 45.7 ≦ γ < 90.0 50 < h < λ ≦ 70 124 < θ ≦ 128 1 < Pt ≦3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 <Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 56.8 ≦ γ < 90.0  7.5< Al ≦ 12.5 46.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 36.5 ≦ γ < 90.0 5 < Pt ≦ 72.5 < Al ≦ 7.5 33.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 29.4 ≦ γ < 90.0 12.5 <Al ≦ 17.5 26.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 57.2 ≦ γ < 90.0  7.5< Al ≦ 12.5 51.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.9 ≦ γ < 90.0 128 < θ ≦132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ< 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 54.1 ≦γ < 90.0  7.5 < Al ≦ 12.5 40.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 35.8 ≦ γ <90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 48.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 40.6 ≦ γ< 90.0 12.5 < Al ≦ 17.5 53.7 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 51.6 ≦γ < 90.0  7.5 < Al ≦ 12.5 50.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5   46 ≦ γ <90.0

TABLE 15 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 50 < h < λ ≦ 70132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 18.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 42.6 ≦ γ < 90.0 12.5 < Al ≦ 17.527.6 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.2 ≦ γ < 90.0  7.5 < Al ≦12.5 32.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5   43 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 44.6 ≦ γ < 90.0  7.5 < Al ≦ 12.5 49.9 ≦ γ < 90.0 12.5 < Al ≦17.5 45.2 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 19.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.012.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.4 ≦ γ <90.0  7.5 < Al ≦ 12.5   33 ≦ γ < 90.0 12.5 < Al ≦ 17.5 30.1 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5   48 ≦ γ < 90.012.5 < Al ≦ 17.5   44 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.510.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 26.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.4≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5  45 ≦ γ < 90.0  7.5 < Al ≦ 12.5 43.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.5 ≦γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 48.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 48.1≦ γ < 90.0 12.5 < Al ≦ 17.5   48 ≦ γ < 90.0

Meanwhile, in the case where the piezoelectric substrate 10 is LiNbO₃,it is preferable that −5°≦φ≦+5°, +80°≦θ≦+130°, −10°≦φ≦+10°, and10°≦γ<90° are satisfied, where the Euler Angles of the piezoelectricsubstrate are specified to be (φ,θ,φ) and the groove angle is specifiedto be γ. According to this configuration, in the case where thepiezoelectric substrate 10 is made of LiNbO₃ and a boundary acousticwave in the SH (Shear Horizontal) mode is utilized, the stop band can befurther increased. Moreover, a propagation loss of the boundary acousticwave can be reduced particularly, and an occurrence of unnecessaryspurious response can be suppressed effectively.

FIG. 80 to FIG. 84 show the relationship between the groove angle (γ)and the stop band, where the cross-sectional shape is as shown in FIG.17 and the piezoelectric substrate is made of LiNbO₃. In this regard,the design parameters of the data shown in FIG. 80 to FIG. 84 are asdescribed below.

Piezoelectric substrate 10: LiNbO₃ substrate having Euler Angles (φ,θ,φ)of (0,85°,0), (0,95°,0), (0,105°,0), (0,115°,0), or (0,125°,0)

Electrode finger ratio (duty) of IDT electrode 13: 0.5

First dielectric layer 11: SiO₂ layer (film thickness normalized by wavelength: 60%)

First electrode layer 13 a; Pt layer (film thickness normalized by wavelength: 4%)

Second electrode layer 13 b; Al layer (film thickness normalized by wavelength: 10%)

First to third diffusion preventing films 13 c to 13 e; Ti film (filmthickness normalized by wave length: 0.5%)

Meanwhile, in the case where the piezoelectric substrate 10 is LiNbO₃,it is preferable that −5°≦φ≦+5°, +200°≦θ≦+250°, −10°≦φ≦+10°, and10°≦γ<90° are satisfied. According to this configuration, in the casewhere the piezoelectric substrate 10 is made of LiNbO₃ and a boundaryacoustic wave in the Stoneley mode is utilized, the stop band can befurther increased. Moreover, a propagation loss of the boundary acousticwave can be reduced particularly, and an occurrence of unnecessaryspurious response can be suppressed effectively.

FIG. 85 to FIG. 89 show the relationship between the groove angle (γ)and the stop band, where the cross-sectional shape is as shown in FIG.17 and the piezoelectric substrate is made of LiNbO₃. In this regard,the design parameters of the data shown in FIG. 85 to FIG. 89 are asdescribed below.

Piezoelectric substrate 10: LiNbO₃ substrate having Euler Angles (φ,θ,φ)of (0,205°,0), (0,215°,0), (0,225°,0), (0,235°,0), or (0,245°,0)

Electrode finger ratio (duty) of IDT electrode 13: 0.5

First dielectric layer 11: SiO₂ layer (film thickness normalized by wavelength: 60%)

First electrode layer 13 a; Pt layer (film thickness normalized by wavelength: 4%)

Second electrode layer 13 b; Al layer (film thickness normalized by wavelength: 10%)

First to third diffusion preventing films 13 c to 13 e; Ti film (filmthickness normalized by wave length: 0.5%)

In this regard, in the present specification, Euler Angles, acrystallographic axis, and equivalent Euler Angles refer to thefollowing.

(Euler Angles)

In the present specification, as for the Euler Angles (φ,θ,φ) whichexpress the cutting plane of the substrate and the propagation directionof the boundary wave, the right-handed Euler Angles described in aliterature, “Danseiha Soshi Gijutu Handobukku (Acoustic Wave DeviceTechnology Handbook)” (the Japan Society for the Promotion of Science,Committee for Acoustic Wave Device Technology 150, First copy, Firstedition, Issued on Jan. 30, 1991, p. 549) was used.

That is, for example, regarding the crystallographic axes X, Y, and Z ofLiNbO₃, the X axis was turned about the Z axis by a φ turncounter-clockwise, so as to obtain an Xa axis.

Next, the Z axis was turned about the Xa axis by a θ turncounter-clockwise, so as to obtain a Z′ axis.

The cutting plane of the substrate was specified to be the planeincluding the Xa axis, where the Z′ axis was the normal to the plane.

Then, the direction of the X′ axis obtained by turning the Xa axis aboutthe Z′ axis by a φ turn counter-clockwise was specified to be thepropagation direction of the boundary wave.

(Crystallographic Axis)

Furthermore, the crystallographic axes X, Y, and Z axes given as initialvalues of the Euler Angles are specified to be parallel to the c axis,the X axis is specified to be parallel to any one of a axes in threeequivalent directions, and the Y axis is specified to be in thedirection of normal to the plane including the X axis and the Z axis.

(Equivalent Euler Angles)

In this regard, it is essential only that the Euler Angles (φ,θ,φ) inthe present invention are crystallographically equivalent.

For example, according to a literature (the Journal of AcousticalSociety of Japan, Vol. 36, No. 3, 1980, p. 140-145), LiNbO₃ and LiTaO₃are crystals belonging to trigonal system 3 m point group and,therefore, Formula [1] holds.

$\begin{matrix}\begin{matrix}{{F\left( {\phi,\theta,\varphi} \right)} = {F\left( {{{60{^\circ}} - \phi},{- \theta},{{180{^\circ}} - \varphi}} \right)}} \\{= {F\left( {{{60{^\circ}} + \phi},{- \theta},\varphi} \right)}} \\{= {F\left( {\phi,{{180{^\circ}} + \theta},{{180{^\circ}} - \varphi}} \right)}} \\{= {F\left( {\phi,\theta,{{180{^\circ}} + \varphi}} \right)}}\end{matrix} & \lbrack 1\rbrack\end{matrix}$

Here, F represents any boundary wave characteristic, e.g., anelectromechanical coupling coefficient k_(s) ², a propagation loss, TCF,PFA, or natural unidirectionality.

It is believed that the natural unidirectionality of PFA, for example,in the case where the positive direction and the negative direction ofpropagation are reversed, is equivalent in practice because the absolutevalues are equal, although the sign is changed.

In this regard, the above-described literature relates to the surfaceacoustic wave. However, the symmetry of crystal is treated in the samemanner regarding the boundary wave.

For example, the boundary wave propagation characteristics of the EulerAngles (30°,θ,φ) are equivalent to the boundary wave propagationcharacteristics of the Euler Angles (90°, 180°−θ, 180°−φ).

Moreover, for example, the boundary wave propagation characteristics ofthe Euler Angles)(30°, 90°, 45°) are equivalent to the boundary wavepropagation characteristics of the Euler Angles shown in Table 16.

In this regard, the material constant of the conductor used forcalculation in the present invention is a value of a polycrystal.However, regarding crystals, e.g., epitaxial films, as well, the crystalorientation dependence of the substrate is predominant over the boundarywave characteristics as compared with the crystal orientation dependenceof the film in itself. Therefore, the boundary wave propagationcharacteristics at the same level to the extent that cause no problem inpractice are obtained on the basis of Formula [1].

TABLE 16 φ (°) θ (°) ψ (°) 30 90 225 30 270 135 30 270 315 90 90 135 9090 315 90 270 45 90 270 225 150 90 45 150 90 225 150 270 135 150 270 315210 90 135 210 90 315 210 270 45 210 270 225 270 90 45 270 90 225 270270 135 270 270 315 330 90 135 330 90 315 330 270 45 330 270 225(Other Modified Preferred Embodiments)

In the above-described preferred embodiments, the three-media boundaryacoustic wave device formed from a piezoelectric material, and the firstand the second dielectric layers is explained. However, the boundaryacoustic wave device according to the present invention is not limitedto the three-media boundary acoustic wave device. The boundary acousticwave device according to the present invention may be a two-mediaboundary acoustic wave device not including the second dielectric layer.In this regard, in the case where the second dielectric layer isdisposed, an insertion loss can be reduced because of a waveguide effectand, therefore, it is preferable that the boundary acoustic wave deviceaccording to the present invention is the three-media boundary acousticwave device.

In the present invention, the IDT electrode structure is not limited tothe structures shown in the above-described preferred embodiment and thefirst modified preferred embodiment. The IDT electrode may have, forexample, structures as shown in FIG. 11 to FIG. 16.

In the example shown in FIG. 11, the IDT electrode 13 is formed from afirst diffusion preventing film 13 c disposed in a groove 10 a on apiezoelectric substrate 10 a, first electrode layer 13 a disposed on thefirst diffusion preventing film 13 c, a second electrode layer 13 bdisposed on the first electrode layer 13 a, and a second diffusionpreventing film 13 d disposed between the first electrode layer 13 a andthe second electrode layer 13 b. Then, all the first and the secondelectrode layers 13 a and 13 b and the first and the second diffusionpreventing films 13 c and 13 d are disposed in the groove 10 a. As shownin FIG. 11, diffusion of the electrode material from the electrodelayers 13 a and 13 b can be prevented by disposing the diffusionpreventing films 13 c and 13 d between the electrode layers 13 a and 13b adjacent to each other and between the electrode layer 13 a and thepiezoelectric substrate 10. Furthermore, the adhesion between theelectrode layers 13 a and 13 b can be enhanced.

The material for the diffusion preventing films 13 c and 13 d is notspecifically limited. For example, the diffusion preventing films 13 cand 13 d can be made of, for example, at least one type of metalselected from the group consisting of Ti, Ni, Cr, and Ta or an alloycontaining at least one type of metal selected from the group consistingof Ti, Ni, Cr, and Ta.

Alternatively, in the example shown in FIG. 12, only a first electrodelayer 13 a is disposed as the electrode layer, and a first diffusionpreventing film 13 c is disposed between the first electrode layer 13 aand the piezoelectric substrate 10. A part of the first electrode layer13 a is located in the groove 10 a, and the remainder portion is locatedoutside the groove 10 a.

Regarding the example shown in FIG. 13, as in the example shown in FIG.12, the IDT electrode 13 is formed from a first electrode layer 13 a anda first diffusion preventing film 13 c. In the example shown in FIG. 13,the surface of the central portion of the first electrode layer 13 a isflush with the surface 10 b of a piezoelectric substrate 10, and aportion excluding the end portion of the first electrode layer 13 a islocated in the groove 10 a.

Regarding the example shown in FIG. 14, as in the example shown in FIG.11, the IDT electrode 13 is formed from first and second electrodelayers 13 a and 13 b and first and second diffusion preventing films 13c and 13 d. In the example shown in FIG. 11, the whole IDT electrode 13is located in the groove 10 a. However, in the example shown in FIG. 14,a part of the first electrode layer 13 a, the second diffusionpreventing film 13 d, and the second electrode layer 13 b are locatedoutside the groove 10 a. Consequently, in the example shown in FIG. 14,in the inside of the groove 10 a, only the first electrode layer 13 amade of a high-density electrically conductive material is located, andthe second electrode layer 13 b made of a low-density electricallyconductive material is not located.

Regarding the example shown in FIG. 15 as well, as in the example shownin FIG. 11 and the example shown in FIG. 14, the IDT electrode 13 isformed from first and second electrode layers 13 a and 13 b and firstand second diffusion preventing films 13 c and 13 d. In the exampleshown in FIG. 15, only the first electrode layer 13 a made of ahigh-density electrically conductive material of the first and thesecond electrode layers 13 a and 13 b is located in the groove 10 a, andthe second electrode layer 13 b is located outside the groove 10 a.Concretely, the first electrode layer 13 a and the first and the seconddiffusion preventing films 13 c and 13 d are located in the groove 10 a,and the second electrode layer 13 b is located outside the groove 10 a.

Regarding the example shown in FIG. 16 as well, as in the examples shownin FIGS. 11, 14 and 15, the IDT electrode 13 is formed from first andsecond electrode layers 13 a and 13 b and first and second diffusionpreventing films 13 c and 13 d. In the example shown in FIG. 16, a partof each of the first and the second electrode layers 13 a and 13 b islocated in the groove 10 a. That is, a part of the second electrodelayer 13 b made of a low-density electrically conductive material isalso located in the groove 10 a.

In this regard, in the examples shown in FIGS. 11 to 16, the case whereonly the first and the second electrode layers 13 a and 13 b areincluded as the electrode layers is explained. However, the IDTelectrode 13 may include at least three electrode layers.

Meanwhile, the boundary acoustic wave device according to the presentinvention may be, for example, a resonator or a filter device.

Furthermore, the cross-sectional shape of the groove disposed in thepiezoelectric substrate is not specifically limited to the trapezoidalshape and may be a semi-elliptic shape, a semi-oval shape, a triangularshape, or the like.

Moreover, it is essential only that the angle formed by the upper endportion of the inside surface of the groove with the surface of thepiezoelectric substrate is less than 90 degrees, and a portion whichforms an angle of 90° or more with the surface of the piezoelectricsubstrate may be present as a part of the inside surface of the groove.

While preferred embodiments of the present invention have been describedabove, it is to be understood that variations and modifications will beapparent to those skilled in the art without departing from the scopeand spirit of the present invention. The scope of the present invention,therefore, is to be determined solely by the following claims.

1. A boundary acoustic wave device comprising: a piezoelectric substrateincluding a surface provided with a groove; a first dielectric layerdisposed on the surface of the piezoelectric substrate; and an IDTelectrode disposed at a boundary between the piezoelectric substrate andthe first dielectric layer such that at least a first portion thereof islocated in the groove; wherein inside of the groove, a groove angle,which is defined as an angle between an upper end portion of an insidesurface of the groove and the surface of the piezoelectric substrate, isless than 90 degrees; a second portion of the IDT electrode is locatedoutside of the groove; and the second portion of the IDT electrode istapered with decreasing distance away from the piezoelectric substrate.2. The boundary acoustic wave device according to claim 1, furthercomprising a second dielectric layer which is disposed on the firstdielectric layer and which has an acoustic velocity larger than that ofthe first dielectric layer.
 3. The boundary acoustic wave deviceaccording to claim 2, wherein each of the first and the seconddielectric layers is made of silicon oxide, silicon nitride, or aluminumnitride.
 4. The boundary acoustic wave device according to claim 1,wherein an average density of the first portion of the IDT electrode ishigher than an average density of the piezoelectric substrate.
 5. Theboundary acoustic wave device according to claim 1, wherein at least aportion of the first portion of the IDT electrode is made of at leastone metal selected from the group consisting of Pt, Au, W, Ta, Mo, Ni,and Cu or an alloy containing at least one metal selected from the groupconsisting of Pt, Au, W, Ta, Mo, Ni, and Cu.
 6. The boundary acousticwave device according to claim 1, wherein the IDT electrode includes alaminate including a plurality of electrode layers, and a resistivity ofat least one layer of the plurality of electrode layers is about 5 μΩcmor less.
 7. The boundary acoustic wave device according to claim 6,wherein the electrode layer having a resistivity of about 5 μΩcm or lessis made of at least one metal selected from the group consisting of Al,Cu, Au, and Ag or an alloy containing at least one metal selected fromthe group consisting of Al, Cu, Au, and Ag.
 8. The boundary acousticwave device according to claim 1, wherein the IDT electrode includes alaminate including a plurality of electrode layers, and a diffusionpreventing film is disposed in at least one of a location between theIDT electrode and a bottom of the groove and a location between adjacentelectrode layers of the plurality of electrode layers.
 9. The boundaryacoustic wave device according to claim 8, wherein the diffusionpreventing film is made of at least one metal selected from the groupconsisting of Ti, Ni, Cr, and Ta or an alloy containing at least onemetal selected from the group consisting of Ti, Ni, Cr, and Ta.
 10. Theboundary acoustic wave device according to claim 1, wherein thepiezoelectric substrate is made of LiTaO₃.
 11. The boundary acousticwave device according to claim 10, wherein the IDT electrode includes afirst electrode layer, which is located in the groove of thepiezoelectric substrate and which includes Pt, and a second electrodelayer, which is located outside the groove of the piezoelectricsubstrate and which includes Al, and the first dielectric layer is madeof silicon oxide; and θ of the Euler Angles (φ,θ,φ) and the groove angleγ are within the range specified in Tables 1 to 4 described below andeach of φ and φ of the Euler Angles is within the range of 0°±5°, wherethe Euler Angles of the piezoelectric substrate are specified to be(φ,θ,φ) and the groove angle is specified to be γ TABLE 1 Thickness offirst θ of Euler Angles Thickness of first Thickness of seconddielectric layer h/λ [%] (φ, θ, φ) [°] electrode layer h/λ [%] electrodelayer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30 124 < θ ≦ 128 1 < Pt ≦ 32.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 <Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 37.1 ≦ γ < 90.0  7.5< Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.5 ≦ γ < 90.0 5 < Pt ≦ 72.5 < Al ≦ 7.5 37.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 32.4 ≦ γ < 90.0 12.5 <Al ≦ 17.5 29.9 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 52.1 ≦ γ < 90.0  7.5< Al ≦ 12.5 57.5 ≦ γ < 90.0 12.5 < Al ≦ 17.5 62.8 ≦ γ < 90.0 128 < θ ≦132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ< 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 19.3 ≦γ < 90.0  7.5 < Al ≦ 12.5 32.1 ≦ γ < 90.0 12.5 < Al ≦ 17.5 34.8 ≦ γ <90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 38.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5   34 ≦ γ< 90.0 12.5 < Al ≦ 17.5   30 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 49.2 ≦γ < 90.0  7.5 < Al ≦ 12.5 50.3 ≦ γ < 90.0 12.5 < Al ≦ 17.5 50.8 ≦ γ <90.0 132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 <Al ≦ 7.5 18.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 27.9 ≦ γ < 90.0 12.5 < Al ≦17.5   27 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5   40 ≦ γ < 90.0  7.5 < Al≦ 12.5   35 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.7 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 49.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2 ≦ γ < 90.0 12.5 < Al ≦17.5 47.4 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 18.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 32.5 ≦ γ < 90.012.5 < Al ≦ 17.5 37.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 41.3 ≦ γ <90.0  7.5 < Al ≦ 12.5 38.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5   35 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 49.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 49.8 ≦ γ < 90.012.5 < Al ≦ 17.5 49.5 ≦ γ < 90.0

TABLE 2 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 10 < h < λ ≦ 30140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 41.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.9 ≦ γ < 90.0 12.5 < Al ≦ 17.546.3 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 46.6 ≦ γ < 90.0  7.5 < Al ≦12.5 41.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 38.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 51.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 39.2 ≦ γ < 90.0 12.5 < Al ≦17.5   41 ≦ γ < 90.0 30 < h < λ ≦ 50 124 < θ ≦ 128 1 < Pt ≦ 3 2.5 < Al ≦7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.510.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 18.8 ≦ γ < 90.0  7.5 < Al ≦12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 <Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5 34.2 ≦ γ < 90.0 12.5 < Al ≦17.5 32.6 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.2 ≦ γ < 90.0  7.5 < Al≦ 12.5 58.4 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.0 ≦ γ < 90.0 128 < θ ≦ 132 1< Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.012.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5   20 ≦ γ <90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5< Pt ≦ 7 2.5 < Al ≦ 7.5 39.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.3 ≦ γ < 90.012.5 < Al ≦ 17.5 33.2 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 59.9 ≦ γ <90.0  7.5 < Al ≦ 12.5 48.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5 41.2 ≦ γ < 90.0132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 20.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 36.9 ≦ γ < 90.0  7.5 < Al ≦12.5 35.8 ≦ γ < 90.0 12.5 < Al ≦ 17.5 33.4 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 38.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 36.2 ≦ γ < 90.0 12.5 < Al ≦17.5 37.4 ≦ γ < 90.0

TABLE 3 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 30 < h < λ ≦ 50136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 22.5 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.3 ≦ γ < 90.0 12.5 < Al ≦ 17.518.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 40.5 ≦ γ < 90.0  7.5 < Al ≦12.5 30.7 ≦ γ < 90.0 12.5 < Al ≦ 17.5 32.3 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5   46 ≦ γ < 90.0  7.5 < Al ≦ 12.5   45 ≦ γ < 90.0 12.5 < Al ≦17.5 36.3 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.5   19 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 26.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 22.7 ≦ γ < 90.012.5 < Al ≦ 17.5 18.1 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 41.8 ≦ γ <90.0  7.5 < Al ≦ 12.5 39.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 40.7 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 46.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 46.1 ≦ γ < 90.012.5 < Al ≦ 17.5 45.7 ≦ γ < 90.0 50 < h < λ ≦ 70 124 < θ ≦ 128 1 < Pt ≦3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 <Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 56.8 ≦ γ < 90.0  7.5< Al ≦ 12.5 46.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 36.5 ≦ γ < 90.0 5 < Pt ≦ 72.5 < Al ≦ 7.5 33.8 ≦ γ < 90.0  7.5 < Al ≦ 12.5 29.4 ≦ γ < 90.0 12.5 <Al ≦ 17.5 26.1 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 57.2 ≦ γ < 90.0  7.5< Al ≦ 12.5 51.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.9 ≦ γ < 90.0 128 < θ ≦132 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ< 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 54.1 ≦γ < 90.0  7.5 < Al ≦ 12.5 40.9 ≦ γ < 90.0 12.5 < Al ≦ 17.5 35.8 ≦ γ <90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 48.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 40.6 ≦ γ< 90.0 12.5 < Al ≦ 17.5 53.7 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 51.6 ≦γ < 90.0  7.5 < Al ≦ 12.5 50.6 ≦ γ < 90.0 12.5 < Al ≦ 17.5   46 ≦ γ <90.0

TABLE 4 Thickness of first θ of Euler Angles Thickness of firstThickness of second dielectric layer h/λ [%] (φ, θ, φ) [°] electrodelayer h/λ [%] electrode layer h/λ [%] Groove angle [°] 50 < h < λ ≦ 70132 < θ ≦ 136 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ < 90.0  7.5 < Al ≦ 12.510.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦7.5 18.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 42.6 ≦ γ < 90.0 12.5 < Al ≦ 17.527.6 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.2 ≦ γ < 90.0  7.5 < Al ≦12.5 32.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5   43 ≦ γ < 90.0 7 < Pt ≦ 9 2.5 <Al ≦ 7.5 44.6 ≦ γ < 90.0  7.5 < Al ≦ 12.5 49.9 ≦ γ < 90.0 12.5 < Al ≦17.5 45.2 ≦ γ < 90.0 136 < θ ≦ 140 1 < Pt ≦ 3 2.5 < Al ≦ 7.5 10.0 ≦ γ <90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦ γ < 90.0 3< Pt ≦ 5 2.5 < Al ≦ 7.5 19.7 ≦ γ < 90.0  7.5 < Al ≦ 12.5 18.0 ≦ γ < 90.012.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5 34.4 ≦ γ <90.0  7.5 < Al ≦ 12.5   33 ≦ γ < 90.0 12.5 < Al ≦ 17.5 30.1 ≦ γ < 90.0 7< Pt ≦ 9 2.5 < Al ≦ 7.5 41.2 ≦ γ < 90.0  7.5 < Al ≦ 12.5   48 ≦ γ < 90.012.5 < Al ≦ 17.5   44 ≦ γ < 90.0 140 < θ ≦ 144 1 < Pt ≦ 3 2.5 < Al ≦ 7.510.0 ≦ γ < 90.0  7.5 < Al ≦ 12.5 10.0 ≦ γ < 90.0 12.5 < Al ≦ 17.5 10.0 ≦γ < 90.0 3 < Pt ≦ 5 2.5 < Al ≦ 7.5 26.3 ≦ γ < 90.0  7.5 < Al ≦ 12.5 19.4≦ γ < 90.0 12.5 < Al ≦ 17.5 18.0 ≦ γ < 90.0 5 < Pt ≦ 7 2.5 < Al ≦ 7.5  45 ≦ γ < 90.0  7.5 < Al ≦ 12.5 43.2 ≦ γ < 90.0 12.5 < Al ≦ 17.5 39.5 ≦γ < 90.0 7 < Pt ≦ 9 2.5 < Al ≦ 7.5 48.9 ≦ γ < 90.0  7.5 < Al ≦ 12.5 48.1≦ γ < 90.0 12.5 < Al ≦ 17.5  48 ≦ γ < 90.0.


12. The boundary acoustic wave device according to claim 1, wherein thepiezoelectric substrate is made of LiNbO₃.
 13. A boundary acoustic wavedevice comprising: a piezoelectric substrate including a surfaceprovided with a groove; a first dielectric layer disposed on the surfaceof the piezoelectric substrate; and an IDT electrode disposed at aboundary between the piezoelectric substrate and the first dielectriclayer such that at least a first portion thereof is located in thegroove; wherein inside of the groove, a groove angle, which is definedas an angle between an upper end portion of an inside surface of thegroove and the surface of the piezoelectric substrate, is less than 90degrees; the piezoelectric substrate is made of LiNbO₃; and −5°≦φ≦+5°,+80°≦θ≦+130°, −10°≦φ≦+10°, and 10°≦γ<90° are satisfied, where the EulerAngles of the piezoelectric substrate are specified to be (φ,θ,φ) andthe groove angle is specified to be γ.
 14. A boundary acoustic wavedevice comprising: a piezoelectric substrate including a surfaceprovided with a groove; a first dielectric layer disposed on the surfaceof the piezoelectric substrate; and an IDT electrode disposed at aboundary between the piezoelectric substrate and the first dielectriclayer such that at least a first portion thereof is located in thegroove; wherein inside of the groove, a groove angle, which is definedas an angle between an upper end portion of an inside surface of thegroove and the surface of the piezoelectric substrate, is less than 90degrees; the piezoelectric substrate is made of LiNbO₃; and −5°≦φ≦+5°,+200°≦θ≦+250°, −10°≦φ≦+10°, and 10°≦γ<90° are satisfied, where the EulerAngles of the piezoelectric substrate are specified to be (φ,θ,φ) andthe groove angle is specified to be γ.
 15. A boundary acoustic wavedevice comprising: a piezoelectric substrate including a surfaceprovided with a groove; a first dielectric layer disposed on the surfaceof the piezoelectric substrate; and an IDT electrode disposed at aboundary between the piezoelectric substrate and the first dielectriclayer such that at least a first portion thereof is located in thegroove; wherein in an inside of the groove, a groove angle, which isdefined as an angle between an upper end portion of an inside surface ofthe groove with the surface of the piezoelectric substrate, is in arange of about 10° to about 80°.